pattern defect meaning in Chinese

花纹缺陷

The study results obtained by afm suggest that the flow pattern defects were revealed as having wedge shape and there were small octahedron voids surrounded by { 111 } which were the same as cops and lstds planes were observed at the tips of flow pattern defects
用原子力显微镜对fpds结构的研究结果表明， fpds缺陷形如抛物线，并且在其端部存在有和cops 、 lstds缺陷相同的由{ 111 }面构成的八面体空洞。
In this paper , the flow pattern defects ( fpds ) were revealed by secco etchant and their shape , distribution on wafer and tip structure were studied in details by optical microscope and atomic force microscope ( afm ) . the relationship between etching time and the tip structure of fpds was also discussed . furthermore , by studying the effect of rapid thermal annealing ( rta ) on the density of fpds in ar , the annihilation mechanism of fpds was discussed in this paper
本文将cz硅单晶片在secco腐蚀液中择优腐蚀后，用光学显微镜和原子力显微镜对流动图形缺陷( flowpatterndefects , fpds )在硅片中的形态、分布及其端部的微观结构进行了仔细地观察和研究，并讨论了腐蚀时间对fpds缺陷端部结构的影响；本文还通过研究ar气氛下快速退火( rapidthermalannealing , rta )对fpds缺陷密度的影响，初步探讨了fpds的消除机理。